NF EN 62047-1

NF EN 62047-1

November 2016
Standard Current

Semiconductor devices - Micro-electromechanical devices - Part 1 : terms and definitions

Le présent document définit des termes pour les dispositifs microélectromécaniques en incluant le procédé de production de ces dispositifs.

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Main informations

Collections

National standards and national normative documents

Publication date

November 2016

Number of pages

38 p.

Reference

NF EN 62047-1

ICS Codes

31.080.99   Other semiconductor devices

Classification index

C96-050-1

Print number

1

International kinship

IEC 62047-1:2016

European kinship

EN 62047-1:2016
Sumary
Semiconductor devices - Micro-electromechanical devices - Part 1 : terms and definitions

Le présent document définit des termes pour les dispositifs microélectromécaniques en incluant le procédé de production de ces dispositifs.
Replaced standards (1)
NF EN 62047-1
September 2006
Standard Cancelled
Semiconductor devices - Micro- electromechanical devices - Part 1 : terms and definitions

Le présent document définit des termes pour les dispositifs microélectromécaniques en incluant le processus de production de ces dispositifs.

Table of contents
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  • 1 Domaine d'application
  • 2 Termes et définitions
  • Annexe A (informative)Points de vue et critères pris en compte lors de la rédaction du présent glossaire
  • Annexe B (informative)Références croisées des articles de la IEC 62047-1:2005 et de la IEC 62047-1:2015
  • Bibliographie Bibliographie
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